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single-wafer metal-etch systems

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Series: ASM Handbook Archive
Volume: 11
Publisher: ASM International
Published: 01 January 2002
DOI: 10.31399/asm.hb.v11.a0003533
EISBN: 978-1-62708-180-1
... structure of various metals is imaged using secondary and backscattered electrons. While the layers can be clearly seen in the etched sample, it is only in the BSE image that the large difference in atomic number of the components is discerned. If a polished, homogeneous, single-phase sample were placed...
Series: ASM Handbook
Volume: 11
Publisher: ASM International
Published: 15 January 2021
DOI: 10.31399/asm.hb.v11.a0006769
EISBN: 978-1-62708-295-2
... in the etched sample, it is only in the BSE image that the large difference in atomic number of the components is discerned. If a polished, homogeneous, single-phase sample (e.g., an unetched silicon wafer) was placed in an SEM, little or no contrast would be observed using either a secondary or backscattered...
Series: ASM Handbook Archive
Volume: 11
Publisher: ASM International
Published: 01 January 2002
DOI: 10.31399/asm.hb.v11.a0003534
EISBN: 978-1-62708-180-1
... than for quantitative analyses. However, in select cases where appropriate standards are available (e.g., metals on silicon), accurate quantification can be performed ( Ref 5 ). When elemental depth profiles are required, most TOF-SIMS systems can also be operated as a “dynamic” SIMS instrument...
Series: ASM Handbook
Volume: 11B
Publisher: ASM International
Published: 15 May 2022
DOI: 10.31399/asm.hb.v11B.a0006943
EISBN: 978-1-62708-395-9
... surface of the specimen to a depth of a few atomic or molecular layers, generally between 3 and 10 nm for AES and XPS. The depth of analysis in AES and XPS can be increased by ion etching, as the material is removed from the surface by sputtering and simultaneous analysis. Auger electron spectroscopy can...
Series: ASM Handbook
Volume: 11B
Publisher: ASM International
Published: 15 May 2022
DOI: 10.31399/asm.hb.v11B.a0006939
EISBN: 978-1-62708-395-9
... at the same time exhibiting a higher viscosity while the system is stable to prevent any settling or sagging. Modern rheology additives include bodying agents, puffing agents, waxy organic esters, organoclays, amine soaps, metallic ricinolates, and modified hydrogenated castor waxes. With increases...
Series: ASM Handbook
Volume: 11B
Publisher: ASM International
Published: 15 May 2022
DOI: 10.31399/asm.hb.v11B.9781627083959
EISBN: 978-1-62708-395-9