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Rutherford backscattering spectroscopy

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Series: ASM Handbook
Volume: 11
Publisher: ASM International
Published: 15 January 2021
DOI: 10.31399/asm.hb.v11.a0006769
EISBN: 978-1-62708-295-2
... to obtain the utmost resolution possible. Backscattered Electrons Imaging is somewhat different for primary backscattered electrons (BSEs), which are incident electrons that have undergone elastic Rutherford scattering from the nuclei of the atoms that comprise the sample. For this signal...