Physical Vapor Deposition

doi:10.31399/asm.hb.mhde2.a0003219

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ASM Desk Editions

Metals Handbook Desk Edition (2nd Edition)

Edited by

ASM International

DOI:

https://doi.org/10.31399/asm.hb.mhde2.9781627081993

ISBN electronic:

978-1-62708-199-3

Publication date:

1998

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Abstract

Physical vapor deposition (PVD) coatings are harder than any metal and are used in applications that cannot tolerate even microscopic wear losses. This article describes the three most common PVD processes: thermal evaporation, sputtering, and ion plating. It also discusses ion implantation in the context of research and development applications.

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Metals Handbook Desk Edition (2nd Edition)

Physical Vapor Deposition

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