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spatial resolution

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Journal Articles
EDFA Technical Articles (2007) 9 (1): 14–18.
Published: 01 February 2007
...Carmen S. Menoni Recent demonstrations of high-repetition-rate, high-brightness soft X-ray lasers are opening new possibilities for the development of compact imaging systems with spatial resolution approaching the illumination wavelength. This article examines some of configurations that have been...
Journal Articles
EDFA Technical Articles (2012) 14 (1): 4–12.
Published: 01 February 2012
...David C. Joy This article provides an introduction to scanning ion microscopy, explaining how it overcomes one of the biggest limitations of SEMs, namely the tradeoff between spatial resolution and depth of field, while also providing significantly more surface detail, a wide range of novel...
Journal Articles
EDFA Technical Articles (2004) 6 (2): 21–27.
Published: 01 May 2004
...Tohru Koyama; Eiji Yoshida; Junko Komori; Yoji Mashiko Conventional backside imaging takes advantage of silicon’s transmission of light which, based on the Plank relation ( E g = hc/ λ ), occurs at wavelengths greater than 1 µm. Because of diffraction, the lateral spatial resolution of backside...
Journal Articles
EDFA Technical Articles (2013) 15 (1): 12–22.
Published: 01 February 2013
...Kazuaki Yazawa; Dustin Kendig; Daniel Hernandez; Kerry Maize; Shila Alavi; Ali Shakouri This article discusses the setup and use of thermoreflectance imaging, a thermal mapping technique with a spatial resolution in the submicron range and a time resolution down to tens of nanoseconds. It describes...
Journal Articles
EDFA Technical Articles (2015) 17 (3): 12–19.
Published: 01 August 2015
...Franco Stellari; Chung-Ching Lin; Peilin Song Engineers at IBM’s Watson Research Center are contending with one of the most fundamental limitations of imaging technology: the tradeoff between spatial resolution and field of view. In this article, they explain how they created tool interfaces...
Journal Articles
EDFA Technical Articles (2010) 12 (3): 20–27.
Published: 01 August 2010
...S.H. Goh; A.C.T. Quah; J.C.H. Phang; V.K. Ravikumar; S.L. Phoa; V. Narang; J.M. Chin; C.M. Chua The best spatial resolution that can be achieved with far-field optical fault localization techniques is around 20 times larger than the critical defect size at the 45 nm technology node. There is also...
Journal Articles
EDFA Technical Articles (2006) 8 (4): 26–30.
Published: 01 November 2006
...S.I. Woods; A. Orozco; L.A. Knauss Recent improvements in giant magnetoresistance sensors have increased the achievable spatial resolution of magnetic current imaging on packaged devices without a significant compromise in magnetic field sensitivity. Front and backside current imaging examples show...
Journal Articles
EDFA Technical Articles (2008) 10 (2): 20–28.
Published: 01 May 2008
... in this process; TEM because of its superior spatial resolution and STEM because it produces images that are easier to interpret and is less susceptible to chromatic aberrations that can occur in thicker samples. In the past, the use of STEM in FA has been limited due to the time required to switch between...
Journal Articles
EDFA Technical Articles (2010) 12 (1): 14–18.
Published: 01 February 2010
...Itzik Goldberger X-ray computed tomography is a noninvasive technique that can reveal the internal structure of objects in three dimensions with spatial resolution down to 50 nm. This article discusses the basic principles of this increasingly important imaging technology and presents examples...
Journal Articles
EDFA Technical Articles (2010) 12 (3): 4–8.
Published: 01 August 2010
..., phase-locked loop detection techniques, the effect of solid immersion lenses on spatial resolution, and the emergence of production-type sample preparation methods. Copyright © ASM International® 2010 2010 ASM International detection sensitivity electrical biasing fault localization induced...
Journal Articles
EDFA Technical Articles (2011) 13 (2): 4–11.
Published: 01 May 2011
... by improvements in spatial resolution, focal length, F-number, and water couplant temperature control. It also discusses common imaging challenges and explains how they can be resolved. Acoustic microimaging has advanced over the past few years in response to the growing use of thinner silicon die...
Journal Articles
EDFA Technical Articles (2000) 2 (4): 1–21.
Published: 01 November 2000
...D.A. Wollman; John M. Martinis; S.W. Nam; G.C. Hilton; K.D. Irwin; D.A. Rudman; N.F. Bergren; S. Deiker; Martin E. Huber; Dale E. Newbury Improved X-ray detector technology continues to be a critical need in the semiconductor industry, particularly for high-spatial-resolution X-ray microanalysis...
Journal Articles
EDFA Technical Articles (2014) 16 (1): 4–16.
Published: 01 February 2014
...Yun-Yu Wang; Anthony Domenicucci; John Bruley IBM engineers have developed a holographic imaging technique, called dual-lens electron holography, that provides high spatial resolution and field of view without compromising signal-to-noise ratio. This article reviews the basic principles of the new...
Journal Articles
EDFA Technical Articles (2019) 21 (2): 4–7.
Published: 01 May 2019
... and spatial resolution. Laser stimulation is widely used to reveal defects in ICs through either heating or photonic effects. The standard approach is to use lasers with wavelengths above the bandgap wavelength of silicon to create localized heating and below it to generate photocurrent. In practice...
Journal Articles
EDFA Technical Articles (2020) 22 (3): 28–35.
Published: 01 August 2020
...Hiroki Mitsuta; Taiichi Takezaki; Kaoru Sakai; Kenta Sumikawa; Masakatsu Murai; Kotaro Kikukawa Scanning acoustic tomography (SAT) is widely used to detect defects such as voids and delamination in electronic devices. In this article, the authors explain how they improved the spatial resolution...
Journal Articles
EDFA Technical Articles (2024) 26 (2): 4–8.
Published: 01 May 2024
... analysis on a microscopic scale. The results suggest that SThM could be used as a powerful tool for analyzing printed circuit boards and electronic devices with high spatial resolution, during the development cycle, failure analysis during and after manufacture, and during operation. Copyright © ASM...
Journal Articles
EDFA Technical Articles (2006) 8 (2): 4–13.
Published: 01 May 2006
... through a line of zero resistance cannot be detected by any of these techniques. Up until now, the laser stimulation techniques produced better spatial resolution than IR microscopy, because of the shorter wavelengths used. It is a challenge for all of these techniques if a fault dissipates a low amount...
Journal Articles
EDFA Technical Articles (2000) 2 (2): 4–6.
Published: 01 May 2000
... interact more strongly with matter than any available form of radiation and as a result, electron-solid interactions are tightly confined within the sample. This allows high spatial resolution. Secondly, these interactions produce a rich variety of signals that make the SEM a versatile source...
Journal Articles
EDFA Technical Articles (2011) 13 (2): 20–27.
Published: 01 May 2011
... the factors that determine spatial and energy resolution, measurement depth, sensitivity, signal-to-noise ratio, and ease of use. This article provides a practical overview of energy-dispersive spectroscopy (EDS) and its various uses in semiconductor device manufacturing and failure analysis. It explains...
Journal Articles
EDFA Technical Articles (2001) 3 (4): 9–13.
Published: 01 November 2001
.... Scanning laser-SQUID microscopy ( laser-SQUID for short) was demonstrated with a spatial resolution of about 1.3 µm. Applications include IC defect detection before bond pad patterning and without pin selection on completed ICs. Localization areas range from a whole die to a few square microns...