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solid immersion lens
EDFA Technical Articles (2010) 12 (3): 20–27.
Published: 01 August 2010
... a limit on the laser power that can be safely used on 45 nm devices, which further compromises fault localization precision. In this article, the authors explain how they overcome these limitations using pulsed laser-induced imaging techniques and a refractive solid immersion lens. Two case studies show...
EDFA Technical Articles (2004) 6 (2): 21–27.
Published: 01 May 2004
... convex surfaces act as solid immersion lenses that are shown to improve spatial resolution by nearly an order of magnitude. The degree of improvement is evaluated using backside emission microscopy (EMS), optical beam induced current (OBIC) imaging, and laser voltage probing (LVP) and the results...
EDFA Technical Articles (2006) 8 (2): 4–13.
Published: 01 May 2006
... resolution is essential for successful application of thermal IR microscopy to modern IC technologies. This article shows that the use of a silicon solid immersion lens (SIL) may improve the spatial resolution of midrange IR microscopy to better than 1.5 µm. Solid Immersion Lenses If is the light...
EDFA Technical Articles (2015) 17 (1): 12–20.
Published: 01 February 2015
... imaging resolution solid immersion lens through-silicon metrology target 1 2 httpsdoi.org/10.31399/asm.edfa.2015-1.p012 EDFAAO (2015) 1:12-20 1537-0755/$19.00 ©ASM International® ELECTRONIC DEVICE FAILURE ANALYSIS | VOLUME 17 NO. 1 A THROUGH-SILICON METROLOGY TARGET FOR SOLID IMMERSION LENSES, PART I...
EDFA Technical Articles (2014) 16 (2): 26–32.
Published: 01 May 2014
... such as adaptive optics, apodization masks, and interferometric measurements to further improve resolution and sensitivity as well as correct for aberrations.[2,3] 26 Electronic Device Failure Analysis Solid Immersion Lens Invented in 1990 by Mansfield, solid immersion lenses (SILs) have become widely used...
EDFA Technical Articles (2004) 6 (4): 12–17.
Published: 01 November 2004
... surface. Second, some failure analysis techniques require direct contact with the die. For example, the solid immersion lens (SIL) technique requires direct die cooling. Although very low heat fluxes can be managed by direct cooling of the die using forced air convection, it has some application in device...
EDFA Technical Articles (2010) 12 (3): 4–8.
Published: 01 August 2010
..., phase-locked loop detection techniques, the effect of solid immersion lenses on spatial resolution, and the emergence of production-type sample preparation methods. Copyright © ASM International® 2010 2010 ASM International detection sensitivity electrical biasing fault localization induced...
EDFA Technical Articles (2014) 16 (4): 14–19.
Published: 01 November 2014
... Immersion Lens Applications for Nanophotonic Devices, J. Nanophoton., 2008, p. 021854. 6. Solid Immersion Lenses, Technical Update, DCG Systems, Nov. 2011. 7. C. Richardson, G. Liechty, C. Smith, and M. Karow: Putting the Die Contour Back Methods in Advanced Sample Preparation for 3-D and Flip-Chip...
EDFA Technical Articles (2013) 15 (3): 4–11.
Published: 01 August 2013
... sensitive material to the surface of the device (e.g., liquid crystal). The issue with spatial resolution has also been addressed with the use of the solid immersion lens (SIL) with backside analysis. In addition, phase shifts related to the heat propagation inside the device under test (DUT) can be used...
EDFA Technical Articles (2009) 11 (2): 46–48.
Published: 01 May 2009
... and the nanometric scale challenges our optical tools. The sophisticated solid immersion lens provides an incredible optical resolution, thanks to its high numerical aperture, but its limits are very close, and looking at 45 nm technology is already a nightmare. We learned many lessons over the years, but we...
EDFA Technical Articles (2015) 17 (3): 20–28.
Published: 01 August 2015
... SURFACE QUALITY AND CONSISTENT THICKNESS: PART I Kirk A. Martin, RKD Engineering firstname.lastname@example.org INTRODUCTION The use of aplanatic solid immersion lens microscopes requires samples where the bulk silicon is typically thinned to 0.025 to 0.100 ± 0.005 mm (thinner samples are preferred1] This can...
EDFA Technical Articles (2003) 5 (4): 13–24.
Published: 01 November 2003
...Michael R. Bruce; Victoria J. Bruce; Seth Prejean; Jeffery Huynh This article provides a high-level review of the tools and techniques used for backside analysis. It discusses the use of laser scanning and conventional microscopy, liquid and solid immersion lenses, photon emission microscopy (PEM...
EDFA Technical Articles (2013) 15 (4): 52–54.
Published: 01 November 2013
..., and integrating a developing tools and techniques cally at 22 nm and beyond, superhemispherical aplanatic next- to ensure that the U.S. government and for chips assembled generation solid immersion lens has capabilities for circuit analysis using advanced packaging (aSIL) microscope system capable at future...
EDFA Technical Articles (2015) 17 (3): 50–52.
Published: 01 August 2015
... structures. The second team, Boston University, working with DCG Systems, developed a super hemispherical, aplanatic, next-generation solid immersion lens (aSIL) and is integrating it onto a DCG Meridian IV system. The aSIL has a higher numerical aperture than a standard central SIL, and the Boston...
EDFA Technical Articles (2012) 14 (1): 27–31.
Published: 01 February 2012
... improvements by Dave Donnet and novel chemistry developments from Valery Ray. Technical talks also included presentations from Philipp Scholz on novel applications for machining solid immersion lenses in silicon substrate and from Nicholas Antoniou on machining cryogenically cooled samples. Following the talks...
EDFA Technical Articles (2015) 17 (2): 4–9.
Published: 01 May 2015
...William Lo; Howard Marks This is the second article in a two-part series that explains how to measure the performance of solid immersion lenses (SILs) used for backside imaging and analysis. In Part I, published in the February 2015 issue of EDFA , the authors describe how they modified a frontside...
EDFA Technical Articles (2014) 16 (1): 31–48.
Published: 01 February 2014
... panel session. The presentations covered a range of important industry topics, including aplanatic and centric solid immersion lenses (ASILs/ CSILs), different polarization states and their respective impacts on imaging, sample preparation and the criticality for use with high-numerical-aperture (NA...
EDFA Technical Articles (2010) 12 (4): 4–10.
Published: 01 November 2010
... of the resulting image. There are several approaches to increase image resolution and contrast for imaging microelectronic devices through the substrate, such as the use of antireflective coatings, solid immersion lenses, and numerical aperture increasing lenses.[3,4] These approaches require either...
EDFA Technical Articles (2012) 14 (2): 22–27.
Published: 01 May 2012
...-Based Backside Reflected Light and Photon Emission Microscopy by FIB Ultimate Substrate Thinning and Chromatic and Spherical Aberration Correction for Silicon Aplanatic Solid Immersion Lens for Fault Isolation and Photon Emission Microscopy of Integrated Circuits. Another paper, Time-Resolved...
EDFA Technical Articles (2010) 12 (2): 20–28.
Published: 01 May 2010
... Research Projects Activity), first reviewed the basic resolution limits based on diffraction-limited optical performance. Several existing subwavelength imaging techniques were then illustrated, and their potential application to backside FA was described. The techniques included solid immersion lens (SIL...