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objective lenses

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Journal Articles
EDFA Technical Articles (2001) 3 (3): 1–23.
Published: 01 August 2001
..., the author describes the basic design of DUV microscopes, the role of major components, and their effect on imaging quality. Copyright © ASM International® 2001 2001 ASM International CCD camera condensing lenses deep ultraviolet microscopes laser sources objective lenses httpsdoi.org...
Journal Articles
EDFA Technical Articles (2014) 16 (2): 26–32.
Published: 01 May 2014
... methods using aplanatic solid immersion lenses in combination with adaptive optics that correct for aberrations, interferometry to improve signal-to-noise ratios, vortex beams that overcome diffraction limitations, and image reconstruction techniques based on prior knowledge about the objects under...
Journal Articles
EDFA Technical Articles (2015) 17 (1): 12–20.
Published: 01 February 2015
... it can and does degrade over time due, for example, to contamination or wear of the SIL s contact facet or drift in the microscope s optical alignment. Solid immersion lenses and other high-numericalaperture (NA) objective lenses used for backside imaging are optimized for transmission through...
Journal Articles
EDFA Technical Articles (2010) 12 (4): 4–10.
Published: 01 November 2010
... modest if any polishing of the backside of the substrate. As the examples in the article show, it can be implemented with a standard microscope with IR optics, yielding high contrast, high resolution images without the need for complex lenses, AR coatings, or sophisticated scanning electronics...
Journal Articles
EDFA Technical Articles (2006) 8 (2): 4–13.
Published: 01 May 2006
...Otwin Breitenstein; Frank Altmann; Thorsten Riediger; Dieter Karg Backside optical analysis is often aided by solid immersion lenses (SILs), but as the authors of this article explain, SILs improve the resolution of front side thermography as well. The authors describe the physics behind solid...
Journal Articles
EDFA Technical Articles (2000) 2 (1): 10–14.
Published: 01 February 2000
... quitc diITcrcll1 be- difficult 10 cope with the shrinking pallcn! sizcs as with cause ofdilTcrent malcrial contmst cnused by diffcrent re- slcpper oplics. This is because of thc superior numcrical aperture (NA) one can achic\c with microscope objectives compared to stepper lenses. For quitc a long hile...
Journal Articles
EDFA Technical Articles (2022) 24 (4): 4–11.
Published: 01 November 2022
... for a 5x, 20x, as well as a 50x lens. The 50x lens is a dedicated lens for backside analysis. SPECTRAL MEASUREMENTS AND CORRECT DATA EXTRACTION After the complete dataset of Csys is known for all available objective lenses, calibration of the SPEM system is formally finished. Now spectral measurements can...
Journal Articles
EDFA Technical Articles (2005) 7 (1): 26–32.
Published: 01 February 2005
... achieved 3 µm resolution.[4] In 1994, x-ray optics were introduced into an x-ray microscopy beamline, and a resolution of 50 nm was achieved for a test object of metal bars on a SiN membrane.[5] The hope expressed in Ref 5 that tomography of integrated circuit interconnects would be possible was realized...
Journal Articles
EDFA Technical Articles (2015) 17 (3): 12–19.
Published: 01 August 2015
... be acquired with a single acquisition even at the lowest magnification.[4] In Ref 4, the authors developed an advanced automation and control software package to automatically acquire large sets of images from different positions of a chip using air-gap objectives and then mathematically stitch them together...
Journal Articles
EDFA Technical Articles (2000) 2 (2): 4–6.
Published: 01 May 2000
.... This will be done with super high-brightness field emission guns having single atom-sized nanotip emitters. These SEMs will need advanced lenses with hardware that can reduce the spherical and chromatic aberrations to minuscule proportions. Sub-nanometer resolution requires better mechanical stability...
Journal Articles
EDFA Technical Articles (2004) 6 (2): 21–27.
Published: 01 May 2004
... convex surfaces act as solid immersion lenses that are shown to improve spatial resolution by nearly an order of magnitude. The degree of improvement is evaluated using backside emission microscopy (EMS), optical beam induced current (OBIC) imaging, and laser voltage probing (LVP) and the results...
Journal Articles
EDFA Technical Articles (2012) 14 (1): 4–12.
Published: 01 February 2012
... with the SEM? The scanning electron microscope (SEM) has become the most widely used of all advanced imaging tools because it offers a unique range of capabilities. It can resolve and image objects with sizes ranging from millimeters to below 1 nm; it offers multiple ways to generate, collect, and display...
Journal Articles
EDFA Technical Articles (2009) 11 (4): 6–12.
Published: 01 November 2009
.... Use of clever optics, such as solid immersion lenses, can improve the ultimate resolution, potentially reaching ~0.5 m. However, there is little to be done about the 2 to 4 m wavelength band required to produce adequate signals from the thermal radiation. Raman Temperature Probe Raman Scattering...
Journal Articles
EDFA Technical Articles (2010) 12 (3): 4–8.
Published: 01 August 2010
..., phase-locked loop detection techniques, the effect of solid immersion lenses on spatial resolution, and the emergence of production-type sample preparation methods. Copyright © ASM International® 2010 2010 ASM International detection sensitivity electrical biasing fault localization induced...
Journal Articles
EDFA Technical Articles (2018) 20 (4): 4–12.
Published: 01 November 2018
... with the spectral range extending up to 2 GHz was developed in the Fraunhofer IMWS lab in collaboration with industry partners. This substantial increase in frequency leads to a significant decrease in wavelength, which combined with the application of highly focused acoustic objective lenses, would theoretically...
Journal Articles
EDFA Technical Articles (2005) 7 (2): 42–44.
Published: 01 May 2005
..., wavelength, nature of the pho- (continued on page 43) 44 Electronic Device Failure Analysis Volume 7, No. 2 Guest Columnist (continued from page 44) ton emitter, magnification, numerical aperture (NA), integration time, and lens throughput. Many of the claims for high-NA macro lenses are misleading...
Journal Articles
EDFA Technical Articles (2010) 12 (2): 20–28.
Published: 01 May 2010
...), near-field scanning optical microscopy, meta-material hyperlens, point-spread function fitting, entangled photon imaging, and interference microscopy. The SIL objectives are in common use for backside FA and afford up to a factor of 3.5 resolution improvement over standard air objectives. All the other...
Journal Articles
EDFA Technical Articles (2006) 8 (2): 14–20.
Published: 01 May 2006
.... Meeting such an ambitious objective for ever-increasing device complexity requires highly efficient and effective yield learning strategies and thus quick and precise feedback from the failure analysis team. Today, this team must support and sustain the understanding of specific yield issues on qualified...
Journal Articles
EDFA Technical Articles (2014) 16 (4): 14–19.
Published: 01 November 2014
... ±45 mm Silicon substrate Nonapplicable thickness tolerance ±35 mm ±2 mm Spectral band Broadband Broadband Single Thermal sensitivity Negligible Negligible Moderate (0.1-0.2 mm/K) Collected signal 1× 18× 25× = 1.1 mm; n = 3.48; backing objective NA = 0.8. (a) Also referred to as centric SIL. Source...
Journal Articles
EDFA Technical Articles (2004) 6 (4): 12–17.
Published: 01 November 2004
... the silicon die and the SIL ensures that no liquid droplets land on the lens surface, thus affecting the image quality. For this reason, spray cooling techniques may not be successful with regular microscope objectives. In the tests conducted by Ansari et al., the temperature gradient across the die was 31 °C...