Electromigration is a wearout mechanism that contributes significantly to IC failures. This article discusses the causes and effects of this often overlooked failure mode and presents practical guidelines to help analysts determine whether or not electromigration is the cause of a particular failure. It also discusses the differences between aluminum and copper electromigration.

Various NVM technologies are being explored for neuromorphic system realization, including resistive RAM, ferroelectric RAM, phase change RAM, spin transfer torque RAM, and NAND flash. This article discusses the potential of RRAM for such applications and evaluates key performance and reliability metrics in the context of neural network image classification. The authors conclude that the accuracy-power tradeoff may be further improved using alternative material stacks and multi-layer dielectrics so as to achieve better control of the oxygen vacancy or metallic filamentation process that governs RRAM switching characteristics.

This article discusses the generation of heat that occurs in ICs during failure analysis and examines the effectiveness of various die cooling techniques including heat spreading films, spray cooling, and liquid and air jet impingement.

This article discusses the basic principles of dark current spectroscopy (DCS), a measurement technique that can detect and identify low levels of metal contaminants in CMOS image sensors. An example is given in which DCS is used to determine the concentration of tungsten and gold contaminants in an image sensor and estimate the dark current generated by a single atom of each metal.

FIB milling is difficult if not impossible with III-V compound semiconductors and certain interconnect metals because the materials do not react well with the gallium used in most FIB systems. This article discusses the nature of the problem and explains how cryogenic FIB-SEM techniques provide a solution. It describes the basic setup of a FIB-SEM system and provides examples of its use on InN nanocrystals, GaN films, and copper-containing multilayer photovoltaic materials.

Microelectronics failure analysis is based on several approaches to study and understand the origin of failure. In addition to “classic” elemental methods (SIMS, ESCA, etc.), there are a number of less-common techniques that can be valuable but require significant equipment investment, specialized operators, and administrative infrastructure to make them available to analysts, if needed. Ion beam analysis methods (RBS, PIXE, NRA), found at the Bordeaux Nuclear Research Center (France), are examples of these specialized tool sets. The capabilities and improved sensitivities of this site for device examination are demonstrated by several examples.

This article discusses the use of scanning-beam techniques such as EBIC, IBIC, and OBIC to optimize the design of edge-termination structures in vertical GaN and AlGaN power diodes.

Techniques used by failure analysts to provide proper stimuli to diagnose failures in mixed-signal ICs differ from routine digital IC tester stimuli. Mixed-signal parts not only require vector stimulus (i.e., set timing and frequency base), but also analog output sense signals, which are classified by differences in magnitude, frequency, and current. This article explains how a mixed-signal ASIC was analyzed using various signal stimuli.

This article demonstrates the strengths and limitations of electrical testing for locating defects that contribute to contact failures in DRAMs. It presents three case studies, the first of which involves a write problem to a pair of cells that share an open bitline contact. The second case, a read problem between the primary and secondary sense amplifiers, serves as an example of how failure bitmaps and electrical characterization work together to detect and locate defects. The third case is a decoder problem that required additional testing and internal probing in order to determine the location of the defect.

This article presents the principles of scanning thermal microscopy (SThM) instruments and their potential uses for the local thermal analysis of passive and active electronic components and devices. Three examples are given that demonstrate the SThM’s ability to perform thermal analysis on a microscopic scale. The results suggest that SThM could be used as a powerful tool for analyzing printed circuit boards and electronic devices with high spatial resolution, during the development cycle, failure analysis during and after manufacture, and during operation.

Dealing with timing failures in nanometer-scale ICs requires a deeper understanding of critical timing paths, noise mechanisms, process variability, timing rules, and the statistical interaction of random parameter values and distributions. This article examines the factors that affect nanometer timing at both the component and system level. It reviews the timing properties of nanoscale logic gates, latches, edge-triggered flip-flops, clocks and their interconnects, resistive vias, and pipeline structures. It also discusses the challenges involved in determining critical timing paths and the underlying causes of nanometer timing failures.

Engineers at Sandia National Laboratories have developed a technology that may bring down the cost and improve the efficiency of photovoltaic energy conversion. Here they explain how they manufacture photovoltaic modules containing as many as 100,000 silicon solar cells using conventional IC fabrication and PCB assembly techniques. They also explain how they estimate module efficiency based on the IV characteristics of individual cells and the detection of open and short circuits.

Conventional backside imaging takes advantage of silicon’s transmission of light which, based on the Plank relation ( E g = hc/ λ ), occurs at wavelengths greater than 1 µm. Because of diffraction, the lateral spatial resolution of backside imaging techniques is limited to about half the wavelength of the light source used, which is far too coarse to isolate faults in a typical IC. In this article, the authors explain how they overcome this limitation by reprofiling the backside of the silicon, forming spherically shaped domes. The raised convex surfaces act as solid immersion lenses that are shown to improve spatial resolution by nearly an order of magnitude. The degree of improvement is evaluated using backside emission microscopy (EMS), optical beam induced current (OBIC) imaging, and laser voltage probing (LVP) and the results are presented in the article.

Electronic components and assemblies are subjected to temperature variations at every stage of life, resulting in the buildup of internal stress. This article explains how such stress contributes to failures and introduces a measurement technique that allows users to visualize stress distributions and assess their effects on lifetime and reliability. Application examples illustrating the capabilities of the new topography and deformation measurement approach are also presented.

Ex-situ lift out (EXLO) techniques rely on van der Waals forces to transfer FIB milled specimens to various types of carriers using a glass probe micromanipulator. This article describes some of the latest EXLO techniques for site specific scanning transmission electron microscopy, including the use slotted half-grids and vacuum-assisted lift out for plan-view analysis.

Optical second-harmonic generation (SHG) is a noninvasive technique that provides information about interface properties and crystal defects. This article demonstrates the use of SGH in the study of high-k dielectrics, silicon-on-insulator structures, compound semiconductors, and through-silicon vias.

Secondary ion mass spectrometry (SIMS) works by bombarding the surface of a solid sample with ions, freeing charged atomic and molecular species which are then collected and analyzed. This article explains that SIMS has the ability to detect all elements in the periodic table in addition to inherent depth profiling capabilities, making it an indispensable tool for the characterization and analysis of semiconductor components and materials. It also presents several application examples.

Photon emission microscopy (PEM) has proven to be a powerful tool for fault isolation and has adapted well to ongoing changes in technology and emerging needs. In this tutorial, the authors describe the fundamentals of photon emission, the essential elements of a typical PEM system, and the procedures involved in diagnosing various types of failures. They also classify a wide range of photon-emitting defects and explain how PEM is used for backside analysis of flip-chip packaged devices and for timing diagnostics.

This article assesses the capabilities of failure analysis techniques in the context of 65 nm CMOS ICs. It demonstrates the use of OBIRCH, voltage contrast, Seebeck effect imaging, SEM and TEM techniques, and FIB cross-sectioning on failures such as dielectric breakdown, open and resistive vias, voids, shorts, delaminations, and gate oxide defects.

Government and military ICs, like their commercial counterparts, are subject to ever-tightening cost, performance, and time-to-market demands. They must also comply with strict lifetime, reliability, and radiation hardness standards. In dealing with these challenges for internal applications, engineers at Sandia National Laboratories developed a radiation-hardened structured ASIC platform. In this article, they describe the design and development of the platform and the associated challenges for FA and test.