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Journal Articles
Theory of SEM Voltage Contrast and Applications to IC Failure Analysis
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EDFA Technical Articles (2001) 3 (3): 15–18.
Published: 01 August 2001
... about the functionality of ICs. Voltage contrast can be used, for example, to map electrical logic levels and timing waveforms from internal nodes of the chip as it operates inside the SEM chamber. This article describes the fundamentals of voltage contrast and its applications in IC failure analysis...
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View articletitled, Theory of SEM Voltage Contrast and Applications to IC Failure Analysis
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for article titled, Theory of SEM Voltage Contrast and Applications to IC Failure Analysis
Voltage contrast, a phenomenon that occurs in scanning electron microscopes, produces brightness variations in SEM images that correspond to potential variations on the test sample. Through appropriate processing, voltage contrast signals can reveal an extensive amount of information about the functionality of ICs. Voltage contrast can be used, for example, to map electrical logic levels and timing waveforms from internal nodes of the chip as it operates inside the SEM chamber. This article describes the fundamentals of voltage contrast and its applications in IC failure analysis.
Journal Articles
Advancing Technology: Logic Mapping to Enhance Electrical Failure Analysis
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EDFA Technical Articles (2001) 3 (4): 3–11.
Published: 01 November 2001
... database and pattern sets, the extraction can be automated and the analysis completed within minutes. The logic mapping flow is a natural extension of scan-based diagnosis with the potential to reach new levels of electrical failure analysis without the extensive data collection and resources associated...
Abstract
View articletitled, Advancing Technology: <span class="search-highlight">Logic</span> <span class="search-highlight">Mapping</span> to Enhance Electrical Failure Analysis
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for article titled, Advancing Technology: <span class="search-highlight">Logic</span> <span class="search-highlight">Mapping</span> to Enhance Electrical Failure Analysis
Scan-based diagnostics produce high-confidence target lists of suspected faults associated with electrical fail signatures. Physical coordinates extracted from these lists serve as a guide for physical failure analysis. When certain conditions are met for the design database and pattern sets, the extraction can be automated and the analysis completed within minutes. The logic mapping flow is a natural extension of scan-based diagnosis with the potential to reach new levels of electrical failure analysis without the extensive data collection and resources associated with signature analysis. This article describes the logic mapping concept and how to implement the flow. It also presents the results of actual cases in which logic mapping was used.
Journal Articles
ISTFA 2014 User's Group Summaries
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EDFA Technical Articles (2015) 17 (1): 33–37.
Published: 01 February 2015
... consisted of extended wavelength emission detection, laser logic-state imaging, SIGNALS WITH THINNED picosecond time-resolved laser-assisted device alteration (LADA), spectral mapping through transmission grating, SILICON. and many more. The physical improvements consisted of work with aplanatic solid...
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View articletitled, ISTFA 2014 User's Group Summaries
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for article titled, ISTFA 2014 User's Group Summaries
Several technology-focused User's Groups met at ISTFA 2014 to discuss current issues and advances in their areas of interest. This article summarizes key discussion points from the Contactless Fault Isolation User's Group, the Nanoprobing User's Group, the Sample Prep/3-D Package User's Group, and the FIB User's Group.
Journal Articles
Debugging and Diagnosing Scan Chains
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EDFA Technical Articles (2005) 7 (1): 16–24.
Published: 01 February 2005
... be used for testing: (1) stuck-at bits that effectively block the scan chain to a fixed logic level; (2) intermittent bits from a scan bit or bits that do not have scan enable connected correctly; and (3) timing-based hold-time problems that corrupt the data stream by causing bit skipping, bit dropping...
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View articletitled, Debugging and Diagnosing Scan Chains
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for article titled, Debugging and Diagnosing Scan Chains
Scan chains help detect and identify failures in integrated circuits, but they are also susceptible to failure themselves. When scan chains break, it does not necessarily render them useless. Normally, scan chains can be debugged and diagnosed so that they can be fixed or used while masking out vector bits associated with broken or corrupted portions of the chain. This article describes the different ways that scan chains can break and how it tends to affect their performance. It explains how to repair various types of scan chain failures or at least regain partial use for limited testing purposes.
Journal Articles
Diagnostic Technique Selection for SRAM Logic Type Failures
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EDFA Technical Articles (2018) 20 (2): 18–24.
Published: 01 May 2018
... is the primary choice for SRAM scan chain failures because it has the unique capability of mapping the periodic signal in a DUT. In this section, four cases of SRAM logic type failures are analyzed and the appropriate diagnostic techniques are presented. Fig. 7 SEM image showing a poly micro-mask, causing a poly...
Abstract
View articletitled, Diagnostic Technique Selection for SRAM <span class="search-highlight">Logic</span> Type Failures
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for article titled, Diagnostic Technique Selection for SRAM <span class="search-highlight">Logic</span> Type Failures
Selecting a fault isolation technique for a particular type of SRAM logic failure requires an understanding of available methods. In this article, the authors review common fault isolation techniques and present several case studies, explaining how they determined which technique to use.
Journal Articles
Monograin Defect in Polysilicon Gates
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EDFA Technical Articles (2018) 20 (1): 10–18.
Published: 01 February 2018
... at ISTFA 2014), logic-state mapping, and electroluminescence spectroscopy (ISTFA 2015). Laurent Clément obtained a Ph.D. in physics at the Atomic Energy Commissariat in 2006 and an engineer diploma in materials science at the Ecole Nationale Supérieure de Physique de Grenoble in 2011. He is currently...
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View articletitled, Monograin Defect in Polysilicon Gates
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for article titled, Monograin Defect in Polysilicon Gates
Soft electrical failures caused by monograin defects can have a significant impact on yield in technology nodes below 40 nm. Moreover, the failures are hard to identify and the defects give very few signatures during localization testing. In this article, the authors explain how they used nanobeam diffraction with automated crystal orientation and phase mapping to pinpoint a single grain orientation causing the problem and, as a result, are now able to recognize the symptoms of this type of failure, observe the defect, and limit the impact on electrical timing margins through both design and process corrections.
Journal Articles
Voltage Contrast and EBIC Failure Isolation Techniques
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EDFA Technical Articles (2007) 9 (1): 20–23.
Published: 01 February 2007
... crystal. Voltage contrast is typically a first-tier failure isolation technique useful in isolating problems to a specific circuit or circuit block. This is particularly valuable when there is a lack of circuit schematics, die maps, logic diagrams, or bit maps, which can severely limit the amount...
Abstract
View articletitled, Voltage Contrast and EBIC Failure Isolation Techniques
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for article titled, Voltage Contrast and EBIC Failure Isolation Techniques
Voltage contrast followed by electron beam induced current imaging is an effective approach for isolating IC failures. This article briefly reviews the physics of signal generation for both techniques and presents several examples illustrating how this powerful combination contributes to advanced defect localization.
Journal Articles
Review of Defect Localization Techniques for DRAMs
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EDFA Technical Articles (2012) 14 (4): 12–18.
Published: 01 November 2012
... of the bitline. The data are driven through the bitline and the third terminal of the transistor into the cell capacitor. The data that are stored in the cell are either a high or a low voltage level, VBLH or VBLL (bitline high or low), in respect to the reference level (VREF), which is VREF = (VBLH + VBLL)/2...
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View articletitled, Review of Defect Localization Techniques for DRAMs
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for article titled, Review of Defect Localization Techniques for DRAMs
Failure analysis of dynamic random access memory follows a three-step process consisting of electrical test and diagnosis, localization, and physical defect analysis. The electrical test delivers pass-fail results that are graphically displayed in bitmaps, which are then used to localize defects based on layout data. This article describes each step of the process and compares and contrasts laser scanning techniques.
Journal Articles
LVI and LVP Applications in In-Line Scan Chain Failure Analysis
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EDFA Technical Articles (2016) 18 (4): 4–14.
Published: 01 November 2016
... IN SCAN CHAIN DIAGNOSIS HAS IMPROVED THE IN-LINE SCAN CHAIN LOGIC FAILURE ANALYSIS SUCCESS RATE TO THAT OF SRAM FAILURE ANALYSIS. LVI s unique capability to map the periodic signal[7-9] in a DUT makes it a great diagnostic technique for scan chain failure, whether the scan chain failure is due...
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View articletitled, LVI and LVP Applications in In-Line Scan Chain Failure Analysis
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for article titled, LVI and LVP Applications in In-Line Scan Chain Failure Analysis
This article explains how the success rate of in-line scan chain logic macros can be nearly doubled for certain types of failures with the help of laser voltage imaging and laser voltage probing. The authors provide background information on LVI, LVP, and scan chain logic macros and show how they are used to diagnose skip test, clock-type, and soft single-latch failures.
Journal Articles
A Radiation-Hardened Structured ASIC
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EDFA Technical Articles (2006) 8 (2): 28–34.
Published: 01 May 2006
.... Singleevent upset (SEU) protection resistors are incorporated into all memory elements, that is, the SRAM cells and flip-flops. Figure 3 shows the elements that comprise the lowest-level logic tile of the SASIC. This fundamental logic tile consists of approximately 11 equivalent logic gates and 32 bits...
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View articletitled, A Radiation-Hardened Structured ASIC
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for article titled, A Radiation-Hardened Structured ASIC
Government and military ICs, like their commercial counterparts, are subject to ever-tightening cost, performance, and time-to-market demands. They must also comply with strict lifetime, reliability, and radiation hardness standards. In dealing with these challenges for internal applications, engineers at Sandia National Laboratories developed a radiation-hardened structured ASIC platform. In this article, they describe the design and development of the platform and the associated challenges for FA and test.
Journal Articles
Rapid Failure Analysis on Advanced Microprocessors through Unit Level Traceability
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EDFA Technical Articles (2000) 2 (3): 1–10.
Published: 01 August 2000
... Roadmaps page 9) Introduction The data were taken on a 0.25 µm generation CMOS logic technology1 using active devices fabricated in dual wells with shallow trench isolation, complementary-doped gates, and source/ Fig. 1: Wafer map of fractional fallout in burn-in as a function of die location. The larger...
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View articletitled, Rapid Failure Analysis on Advanced Microprocessors through Unit <span class="search-highlight">Level</span> Traceability
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for article titled, Rapid Failure Analysis on Advanced Microprocessors through Unit <span class="search-highlight">Level</span> Traceability
Unit level traceability (ULT) is a powerful tool that allows complete die histories to be accessed in the course of testing and analysis. It is especially useful for identifying the likely causes of microprocessor failures and in cases where failure analysis resources are limited. In the article, the author explains how he used ULT in the investigation of a 0.25-µm CMOS processor. Using the ULT of the die, he discovered a failure signature based on die location on the wafer. One root cause of failure was traced to cross-field variation in the lithography process due to marginal focus control. Another failure, observed after burn-in, was traced to the presence of residual titanium left after metal etch.
Journal Articles
Advancing Technology: Test-Based Failure Analysis – Part 2: Fault Diagnosis
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EDFA Technical Articles (2001) 3 (4): 21–26.
Published: 01 November 2001
... in the test vectors (Unknowns result from portions of the design that cannot be controlled by the scan vectors; common examples are RAM outputs, unscanned flip-flops, isolated latches, analog and asynchronous circuitry, and some pad wiring.) Complete logical to physical mapping; i.e. the ability to convert...
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View articletitled, Advancing Technology: Test-Based Failure Analysis – Part 2: Fault Diagnosis
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for article titled, Advancing Technology: Test-Based Failure Analysis – Part 2: Fault Diagnosis
This is the second article in a two-part series on test-based failure analysis (TBFA). The first article, which appeared in the August 2001 issue of EDFA, discussed the need for automated diagnostics and the general concept of TBFA. This article discusses the steps involved in implementing a TBFA process and addresses the challenges that are likely to be encountered. It explains how to gather data required to link observed behavior to specific faults, how to set up and use fault dictionaries, and how to handle unmodeled as well as bridging faults. It also discusses the use of TBFA with conventional voltage and quiescent current (IDDQ) testing.
Journal Articles
The EDFAS FA Technology Roadmap—FA Future Roadmap
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EDFA Technical Articles (2023) 25 (2): 44–46.
Published: 01 May 2023
... dimension (vertical) with the introduction of CFET and vertical TFET. Therefore, for the logic device front-end FA, this minimum volume must be analyzed with atomic-level resolution with chemical species identification. Other challenges include noninvasive 45 sample prep and imaging of low-k films, even...
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View articletitled, The EDFAS FA Technology Roadmap—FA Future Roadmap
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for article titled, The EDFAS FA Technology Roadmap—FA Future Roadmap
This column is part of a series of reports on the findings to date of the EDFAS Failure Analysis Roadmap Councils. The Failure Analysis Future Roadmap Council (FAFRC) is concerned with identifying the longer term needs of the FA community. This article discusses analysis challenges associated with the growing number of elements being incorporated into integrated circuit fabrication. It includes tables summarizing top challenges in front end and package analysis.
Journal Articles
Failure Analysis Turned Upside Down: A Review of Backside Analysis Techniques
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EDFA Technical Articles (2003) 5 (4): 13–24.
Published: 01 November 2003
... transistor logic states (logic mapping); however, logicstate LIVA signals are much weaker than defectgenerated LIVA signals. Speaking of sensitivity, IC defects will produce LIVA signals 3 to 4 orders of magnitude greater than LIVA signals produced during the logic mapping of nondefective ICs (see subsequent...
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View articletitled, Failure Analysis Turned Upside Down: A Review of Backside Analysis Techniques
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for article titled, Failure Analysis Turned Upside Down: A Review of Backside Analysis Techniques
This article provides a high-level review of the tools and techniques used for backside analysis. It discusses the use of laser scanning and conventional microscopy, liquid and solid immersion lenses, photon emission microscopy (PEM), and laser-based fault isolation methods with emphasis on light-induced voltage alteration (LIVA). It explains how laser voltage probing is used for backside waveform acquisition and describes backside sample preparation and deprocessing techniques including parallel polishing and milling, laser chemical etching, and FIB circuit edit and modification.
Journal Articles
Differential Laser Voltage Probe: A Brief Overview and Thoughts on What Could Come Next
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EDFA Technical Articles (2024) 26 (2): 32–38.
Published: 01 May 2024
... be the vast majority of failure analysis teams. Especially for those that support diverse portfolios built using a wide variety of different technology nodes down to ~5 nm FinFET. From LVP waveform data one can observe logical switching behavior from internal circuits of interest to root cause sources...
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View articletitled, Differential Laser Voltage Probe: A Brief Overview and Thoughts on What Could Come Next
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for article titled, Differential Laser Voltage Probe: A Brief Overview and Thoughts on What Could Come Next
Differential laser voltage probe simultaneously acquires waveform data from a single target while the device under test fluctuates between passing and failing test outcomes. This article describes the use of this technique and how it could be affected by trends in the microelectronics industry.
Journal Articles
Attack of the “Holey Shmoos”
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EDFA Technical Articles (2000) 2 (4): 13–16.
Published: 01 November 2000
... Cache SRAM in the CMOS6X process. It was necessary to run these bit fail maps in some cases at speeds faster than 1.5 ns cycle to capture memory cells failing due to the Holey Shmoo problem. The L1 Cache SRAM self-test logic is equipped with the circuitry necessary to supply onthe-fly fail data...
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View articletitled, Attack of the “Holey Shmoos”
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for article titled, Attack of the “Holey Shmoos”
Shmoo plotting began in the early 1970s and still has wide use in characterizing device performance against various parameters. Typically, Shmoo plots measure device frequency or cycle time versus voltage. The debug described in this article focused on problems (holes) in Shmoo plots discovered while designing a 637-MHz microprocessor. This problem had two distinct phases as the microprocessor design migrated from an older CMOS process technology into a newer, faster one. Resolution of the problem, as the article explains, required advanced DFD/DFT (design for debug/design for test) techniques and FIB circuit edit to resolve.
Journal Articles
Yield-Oriented Logic Failure Characterization for FA Prioritization
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EDFA Technical Articles (2014) 16 (3): 4–12.
Published: 01 August 2014
...Szu Huat Goh; Boon Lian Yeoh; Guo Feng You; Jeffrey Lam This article describes a yield-driven approach for characterizing IC logic failures at the wafer level and presents several case studies to demonstrate its versatility and assess its value. Copyright © ASM International® 2014 2014 ASM...
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View articletitled, Yield-Oriented <span class="search-highlight">Logic</span> Failure Characterization for FA Prioritization
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for article titled, Yield-Oriented <span class="search-highlight">Logic</span> Failure Characterization for FA Prioritization
This article describes a yield-driven approach for characterizing IC logic failures at the wafer level and presents several case studies to demonstrate its versatility and assess its value.
Journal Articles
Product Circuit Validation and Failure Debug: A Semiconductor Foundry Can Help
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EDFA Technical Articles (2017) 19 (4): 22–34.
Published: 01 November 2017
... internal circuit logic and speed paths at large. Some techniques related to such applications are waveform probing of internal nodes[15-18] and logic state mapping.[19] Fundamentally, be it software- or hardware-based approaches to postsilicon failure debug, an in-depth knowledge of the DFT or design...
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View articletitled, Product Circuit Validation and Failure Debug: A Semiconductor Foundry Can Help
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for article titled, Product Circuit Validation and Failure Debug: A Semiconductor Foundry Can Help
Faster time-to-production of a new product is the common goal of design houses and foundries. This article demonstrates how foundries can contribute through post silicon validation, which allows design houses to focus on more complicated issues.
Journal Articles
Advanced Dynamic Laser-Stimulation Methods Using Lock-In and Mixed-Frequency Techniques
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EDFA Technical Articles (2010) 12 (4): 12–20.
Published: 01 November 2010
...-in-voltage mode, the lock-in-current mode facilitates detection of periodic dynamic supply currents.[7] In CMOS logic chips, the transition edges lead to a main dynamic-current consumption. Therefore, the lock-in-current method, as a form of dynamic TLS, is more sensitive to problems occurring during...
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View articletitled, Advanced Dynamic Laser-Stimulation Methods Using Lock-In and Mixed-Frequency Techniques
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for article titled, Advanced Dynamic Laser-Stimulation Methods Using Lock-In and Mixed-Frequency Techniques
A wide range of electrical faults are revealed through thermal laser stimulation (TLS). In principle, an electrical parameter, typically current or voltage, is monitored for changes caused by the heating effects of the laser. Most test setups are designed to limit the activity of the device in order to minimize the signal-to-noise ratio, but in some cases, the fault’s electrical footprint can only be detected when the device is stimulated in a dynamic way. This article describes the setup and implementation of various dynamic TLS methods and presents example applications demonstrating the advantages and limitations of each approach.
Journal Articles
Magnetic Current Imaging in Failure Analysis
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EDFA Technical Articles (2009) 11 (4): 14–21.
Published: 01 November 2009
... (serpentine comb monitor) º Internal circuit leakage (isolated from chip I/O) º I/O leakage º Hard logic fails Die high resistance: º Upper-level metal defects º Cracked die MCI is also used in the FA process to map power distributions, look for shorts and high resistances in stacked die, and isolate...
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View articletitled, Magnetic Current Imaging in Failure Analysis
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for article titled, Magnetic Current Imaging in Failure Analysis
Magnetic current imaging is a proven fault-isolation technique. Its unsurpassed sensitivity and resolution coupled with the fact that magnetic fields are unaffected by packaging and die materials make it a valuable FA tool for a wide variety of ICs and devices. This article reviews the basic measurement physics of magnetic current imaging, describes the general implementation, and presents several practical examples of its use.
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