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laser sources

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Journal Articles
EDFA Technical Articles (2001) 3 (3): 1–23.
Published: 01 August 2001
..., the author describes the basic design of DUV microscopes, the role of major components, and their effect on imaging quality. Copyright © ASM International® 2001 2001 ASM International CCD camera condensing lenses deep ultraviolet microscopes laser sources objective lenses httpsdoi.org...
Journal Articles
EDFA Technical Articles (2007) 9 (1): 14–18.
Published: 01 February 2007
... for development of compact and widely accessible imaging systems having spatial resolution approaching the wavelength of the illumination.[2-9] This article discusses the implementation and demonstration of EUV microscopy with compact high-repetition-rate laser sources. One of these imaging systems uses...
Journal Articles
EDFA Technical Articles (2000) 2 (2): 32–32B.
Published: 01 May 2000
... of a laser source. In addition, the source wavelength must be matched to the transmission characteristics of the test material. This requirement suggests a wavelength around 1060 nanometers for silicon (see below). A high-resolution imaging detector is also needed with a computer interface for image...
Journal Articles
EDFA Technical Articles (2019) 21 (3): 8–14.
Published: 01 August 2019
... of advancements in gas-assisted etching, ion source alternatives, compact spectroscopy, and high-speed lasers. This article discusses the current state of large area integrated circuit deprocessing, the latest achievements in the development of automated deprocessing equipment, and the potential impact...
Journal Articles
EDFA Technical Articles (2010) 12 (3): 44–47.
Published: 01 August 2010
... tools. Optical beam induced current (OBIC) utilizing visible radiation was used to study junction quality in a few labs. Air Force researchers studied and patented the use of a focused laser source to modulate the time delay in digital circuits in 1987. However, the cost of laser scanning systems...
Journal Articles
EDFA Technical Articles (2019) 21 (2): 22–27.
Published: 01 May 2019
... source for optical pumping of the laser induced breakdown spectroscopy (LIBS) instrument designed for the rover used in the Mars Curiosity mission (Fig. 1). For this mission, the qualification process of the component was tailored in terms of consequence. This article describes the component...
Journal Articles
EDFA Technical Articles (2012) 14 (3): 4–11.
Published: 01 August 2012
... of package encapsulants. Over the past few years, laser ablation, which is well applied for package-preparation purposes, has been optimized for the IC level and MEMS (silicon material). In early 2012, the first hybrid equipment integrating an FIB and a laser source appeared on the market, and manufacturers...
Journal Articles
EDFA Technical Articles (2016) 18 (3): 10–16.
Published: 01 August 2016
.... Int. Symp. Test. Fail. Anal. (ISTFA), 2008, pp. 188-92. 6. K. Erington, J. Asquith, and D. Bodoh: Software Enhanced Time Resolved Laser Assisted Device Alteration with a Non-Pulsed Laser Source, Proc. Int. Symp. Test. Fail. Anal. (ISTFA), 2009, pp. 43-51. 7. D. Bodoh, K. Erington, and K. Dickson...
Journal Articles
EDFA Technical Articles (2004) 6 (2): 21–27.
Published: 01 May 2004
... = 0.5). Here, the xenon lamp, not the laser (LSM), is used as a light source for imaging a pattern. In both cases, the image is magnified by introducing the FOSSIL (compare with the LSM image shown in Fig.7). In Fig.10(b), the pattern image looms up along with the emission sites, whereas the image...
Journal Articles
EDFA Technical Articles (2008) 10 (3): 18–26.
Published: 01 August 2008
...Alfred C.T. Quah; Choon Meng Chua; Soon Huat Tan; Lian Ser Koh; Jacob C.H. Phang; Tam Lyn Tan; Chee Lip Gan The use of a pulsed laser with a lock-in amplifier has been shown to increase the detection sensitivity of scanning optical microscopes by a factor of ten. In this article, the authors...
Journal Articles
EDFA Technical Articles (2010) 12 (3): 10–18.
Published: 01 August 2010
...Paiboon Tangyunyong; Edward I. Cole, Jr. Thermally-induced voltage alteration (TIVA) is a laser-based method for localizing interconnect defects in ICs. Its main limitation is that the laser must heat the defect and change its resistance sufficiently to produce a measurable voltage alteration...
Journal Articles
EDFA Technical Articles (2001) 3 (4): 29–35.
Published: 01 November 2001
... the advantages of OBIC and SCEBIC and avoids their disadvantages. System Setup The SCOBIC system combines a scanning optical microscope, laser beam pulsing, transient signal acquisition, and SCOBIC imaging modules. The schematic diagram of the SCOBIC system is shown in Fig. 1. A 633 nm HeNe laser is used...
Journal Articles
EDFA Technical Articles (2017) 19 (1): 26–40.
Published: 01 February 2017
.... The author presented some theory to support paths to tens-of-nanometer RST with circuit invasiveness limited by careful control of the melt depth and average incident laser power, including preliminary results for ultraviolet 355 nm pulsed-laser sources. Submicron Prep Impact on Silicon Lateral Heat...
Journal Articles
EDFA Technical Articles (2023) 25 (4): 12–16.
Published: 01 November 2023
..., the laser energy acts as a localized heat source when focused on the sample and drives the chemical reaction of the adsorbed precursor.[14] The precursor reaction is composed of a copper (II) hexafluoroacetylacetonate (CuHfac) molecule bonded to a tetramethylvinylsilane (TMVS). This structure provides...
Journal Articles
EDFA Technical Articles (2018) 20 (2): 10–16.
Published: 01 May 2018
...Venkat Krishnan Ravikumar; Winson Lua; Gopinath Ranganathan; Angeline Phoa This article explains how laser voltage probing (LVP) can be used to analyze combinational logic circuits. The authors describe how the technique is aided by the development and use of a waveform library and a corresponding...
Journal Articles
EDFA Technical Articles (2016) 18 (4): 4–14.
Published: 01 November 2016
...Zhigang Song; Laura Safran This article explains how the success rate of in-line scan chain logic macros can be nearly doubled for certain types of failures with the help of laser voltage imaging and laser voltage probing. The authors provide background information on LVI, LVP, and scan chain logic...
Journal Articles
EDFA Technical Articles (2003) 5 (4): 27–32.
Published: 01 November 2003
... as voltage changes on a constant cur- rent source) but at a wavelength that is largely transparent to the material. In silicon, a wavelength of approx- imately 1320 nm is convenient for TIVA, because efficient and in- expensive lasers are available at this wavelength. A wavelength of 1320 nm is far enough...
Journal Articles
EDFA Technical Articles (2018) 20 (2): 18–24.
Published: 01 May 2018
... resistance change (OBIRCH8,11] critical parameter analysis (CPA)[12,13] and laser voltage imaging (LVI)[14,15]/laser voltage probing (LVP)[16,17] are available for the fault isolation work. These techniques offer alternatives for stimulating the SRAM device and detecting a response, and therefore provide...
Journal Articles
EDFA Technical Articles (2013) 15 (2): 14–21.
Published: 01 May 2013
..., polishing, and milling techniques. It also includes a case study involving a failure caused by improper laser marking. Chip-scale packages (CSPs) make efficient use of space on PCBs, but their small size, multilevel stacking arrangements, and complex interconnects present serious challenges when...
Journal Articles
EDFA Technical Articles (2009) 11 (4): 6–12.
Published: 01 November 2009
... simulation (black line) for an AlGaN/GaN heterostructure field-effect transistor Fig. 8 Infrared temperature map of an AlGaN/GaN heterostructure field-effect transistor showing high temperatures in the drain-source gap Fig. 10 Block diagram of a Raman microscope integrated into a laser scanning microscope...