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STEM-EBIC imaging

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Journal Articles
EDFA Technical Articles (2002) 4 (4): 29–33.
Published: 01 November 2002
...Kristin Lee Bunker; Terry J. Stark; Dale Batchelor; Juan Carlos Gonzalez; Phillip E. Russell STEM-EBIC imaging, a nano-characterization technique, has been used in the study of electrically active defects, minority carrier diffusion length, surface recombination velocity, and inhomogeneities in Si...
Journal Articles
EDFA Technical Articles (2023) 25 (1): 4–8.
Published: 01 February 2023
... in producing bias-enabled TEM samples from electronic components, as well as strategies to mitigate these issues. Copyright © ASM International® 2023 2023 ASM International focused ion beam milling in-situ TEM biasing sample preparation STEM EBIC imaging 4 httpsdoi.org/10.31399/asm.edfa...
Journal Articles
EDFA Technical Articles (2020) 22 (4): 4–8.
Published: 01 November 2020
... of failure. In this article, the author presents results indicating that STEM EBIC, with the new SEEBIC mode, can provide electronic contrast that complements the physical-based contrast of STEM imaging. By identifying device features at higher risk of failure, the two methods may open a path to predictive...
Journal Articles
EDFA Technical Articles (2018) 20 (3): 24–33.
Published: 01 August 2018
... of this article show how such challenges can be overcome using EBIC/EBAC, current imaging, and nanoprobing. The cases involve a wide range of issues, including resistor chain defects, substrate leakage, microcracking, micro contamination, and open failures due to copper plating problems and missing vias...
Journal Articles
EDFA Technical Articles (2020) 22 (1): 30–41.
Published: 01 February 2020
... of primary applications and tool configurations. easy access to one of these tools. As the majority of the attendees were sectioning/imaging/ STEM-TEM users, the session began there. Lukas Hladik from Tescan presented on the art of large area planar delayer by xenon plasma FIB, and the Richard Young from...
Journal Articles
EDFA Technical Articles (2021) 23 (2): 33–37.
Published: 01 May 2021
... from GlobalFoundries, presented, The Other Side of the Spectrum: How We Identify Fails in Large Packages through Nano-probing and EBIC/EBAC. New advanced packaging architectures are creating challenging requirements for nanoprobing probe areas. The large packages now require up to a 70 mm area...