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Case History Synopsis

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Journal Articles
EDFA Technical Articles (2013) 15 (1): 35–36.
Published: 01 February 2013
... for analyzing defects due to implanter charging effects, and the third paper explains how analysts determined the cause of automatic test pattern generation failures concentrated in certain areas of the wafer. Copyright © ASM International® 2013 2013 ASM International Case History Synopsis ISTFA...
Journal Articles
EDFA Technical Articles (2010) 12 (2): 20–28.
Published: 01 May 2010
... and a Probe in the Nanoworld by Nicholas Antoniou of Harvard University. Nicholas shared a number of novel application case studies where the FIB/scanning electron microscope (SEM) (NVision 40 Crossbeam, Carl Zeiss SMT and SII NanoTechnology Inc.) was used in conjunction with a nanoprobe (Omniprobe 300...