A Dedicated Synchrotron Beamline Suite for Enhanced Validation of Integrated Circuits

Principe, E.L.

doi:10.31399/asm.edfa.2019-4.p060

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Technical article| November 01 2019

A Dedicated Synchrotron Beamline Suite for Enhanced Validation of Integrated Circuits

E.L. Principe

Synchrotron Research Inc.

,

Melbourne Beach, Florida

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EDFA Technical Articles (2019) 21 (4): 60–62.

https://doi.org/10.31399/asm.edfa.2019-4.p060

Abstract

This column discusses the potential benefits of developing a dedicated synchrotron-based tool suite for advanced, high-throughput characterization, deprocessing, and validation of ICs.

hardware security, synchrotron beamline

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2019

ASM International

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