Abstract
This is the second article in a two-part series that explains how to measure the performance of solid immersion lenses (SILs) used for backside imaging and analysis. In Part I, published in the February 2015 issue of EDFA, the authors describe how they modified a frontside metrology target and used it to evaluate a SIL in a backside imaging system, which prompted the development of an unmounted, backside-specific version of the through-silicon target. In Part II, they explain how these new targets, in addition to measuring resolution, are being used to determine the field of view as well as the line spread and edge response of backside imaging systems. They also discuss some of the challenges encountered when using the targets to characterize emission microscopy systems.
