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ASM Handbook

Materials Characterization

Edited by
Ruth E. Whan
Ruth E. Whan
Sandia National Laboratories
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ASM International
ISBN electronic:
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Book Chapter

Auger Electron Spectroscopy

A. Joshi
A. Joshi
Lockheed Palo Alto Research Laboratory
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Page range:
549 - 567


This article describes the principles and applications of Auger electron spectroscopy (AES). It provides information on the instrumentation typically used in the AES, including an electron gun, an electron spectrometer, a secondary electron detector, and an ion gun. The article also describes experimental methods and limitations of the AES, including elemental detection sensitivity, electron beam artifacts, sample charging, spectral peak overlap, high vapor pressure samples, and sputtering artifacts.

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A. Joshi, 1986. "Auger Electron Spectroscopy", Materials Characterization, Ruth E. Whan

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