Skip to Main Content
ASM Handbook

Materials Characterization

Edited by
Ruth E. Whan
Ruth E. Whan
Sandia National Laboratories
Search for other works by this author on:
ASM International
ISBN electronic:
Publication date:
Book Chapter

Rutherford Backscattering Spectrometry

Wei-Kan Chu
Wei-Kan Chu
Department of Physics and Astronomy, University of North Carolina
Search for other works by this author on:
Page range:
628 - 636


Rutherford backscattering spectrometry (RBS) is a major materials characterization technique that can provide information in a short analysis time. It is used for quantitative compositional analysis of thin films, layered structures, or bulk materials and to measure surface impurities of heavy elements on substrates of lighter elements. This article focuses on RBS and its principles, such as collision kinematics, scattering cross section, and energy loss. It describes the channeling effect and the operation of the RBS equipment. The article also provides information on the applications of RBS.

You do not currently have access to this content.
Don't already have an account? Register

Wei-Kan Chu, 1986. "Rutherford Backscattering Spectrometry", Materials Characterization, Ruth E. Whan

Download citation file:

Close Modal
This Feature Is Available To Subscribers Only

Sign In or Create an Account

Close Modal
Close Modal