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ASM Handbook

Materials Characterization

Edited by
Ruth E. Whan
Ruth E. Whan
Sandia National Laboratories
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ASM International
Volume
10
ISBN electronic:
978-1-62708-178-8
Publication date:
1986
Book Chapter

Rutherford Backscattering Spectrometry

By
Wei-Kan Chu
Wei-Kan Chu
Department of Physics and Astronomy, University of North Carolina
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Published:
1986
Page range:
628 - 636

Abstract

Rutherford backscattering spectrometry (RBS) is a major materials characterization technique that can provide information in a short analysis time. It is used for quantitative compositional analysis of thin films, layered structures, or bulk materials and to measure surface impurities of heavy elements on substrates of lighter elements. This article focuses on RBS and its principles, such as collision kinematics, scattering cross section, and energy loss. It describes the channeling effect and the operation of the RBS equipment. The article also provides information on the applications of RBS.

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Wei-Kan Chu, 1986. "Rutherford Backscattering Spectrometry", Materials Characterization, Ruth E. Whan

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