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ASM Desk Editions

Metals Handbook Desk Edition

Edited by
Joseph R. Davis
Joseph R. Davis
Davis & Associates
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ASM International
ISBN electronic:
978-1-62708-199-3
Publication date:
1998
Book Chapter

Chemical Vapor Deposition and Related Processes

Published:
1998
Page range:
1166 - 1167

Abstract

Chemical vapor deposition (CVD) involves the formation of a coating by the reaction of the coating substance with the substrate. Serving as an introduction to CVD, the article provides information on metals, ceramics, and diamond films formed by the CVD process. It further discusses the characteristics of different pack cementation processes, including aluminizing, siliconizing, chromizing, boronizing, and multicomponent coating.

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1998. "Chemical Vapor Deposition and Related Processes", Metals Handbook Desk Edition, Joseph R. Davis

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