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ASM Desk Editions

Metals Handbook Desk Edition

Edited by
Joseph R. Davis
Joseph R. Davis
Davis & Associates
Search for other works by this author on:
ASM International
ISBN electronic:
978-1-62708-199-3
Publication date:
1998
Book Chapter

Physical Vapor Deposition

Published:
1998
Page range:
1167 - 1170

Abstract

Physical vapor deposition (PVD) coatings are harder than any metal and are used in applications that cannot tolerate even microscopic wear losses. This Article describes the three most common PVD processes: thermal evaporation, sputtering, and ion plating. It also discusses ion implantation in the context of research and development applications.

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1998. "Physical Vapor Deposition", Metals Handbook Desk Edition, Joseph R. Davis

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