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ASM Handbook

Metallography and Microstructures

Edited by
George F. Vander Voort
George F. Vander Voort
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ASM International
Volume
9
ISBN electronic:
978-1-62708-177-1
Publication date:
2004
Book Chapter

Scanning Electron Microscopy

By
H.E. Exner
H.E. Exner
Darmstadt University of Technology
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S. Weinbruch
S. Weinbruch
Darmstadt University of Technology
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Published:
2004
Page range:
355 - 367
Publication history
November 01, 2004

Abstract

This article outlines the beam/sample interactions and the basic instrumental design of a scanning electron microscopy (SEM), which include the electron gun, probeforming column (consisting of magnetic electron lenses, apertures, and scanning coils), electron detectors, and vacuum system. It discusses the contrasts mechanisms used for imaging and analyzing materials in the SEM. These include the topographic contrast, compositional contrast, and electron channeling pattern and orientation contrast. Special instrumentation and accessory equipment used at elevated pressures and during the X-ray microanalysis are reviewed. The article also provides information on the sample preparation procedure and the materials applications of the SEM.

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H.E. Exner, S. Weinbruch, 2004. "Scanning Electron Microscopy", Metallography and Microstructures, George F. Vander Voort

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