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ASM Handbook

Failure Analysis and Prevention

Edited by
William T. Becker
William T. Becker
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Roch J. Shipley
Roch J. Shipley
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ASM International
Volume
11
ISBN electronic:
978-1-62708-180-1
Publication date:
2002
Book Chapter

Chemical Characterization of Surfaces

By
John G. Newman
John G. Newman
Physical Electronics, Inc., Evans PHI Analytical Laboratory
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Published:
2002
Page range:
527 - 537
Publication history
November 01, 2002

Abstract

This article provides information on the chemical characterization of surfaces by Auger electron spectroscopy (AES), X-ray photoelectron spectroscopy (XPS), and time-of-flight secondary ion mass spectrometry (TOF-SIMS). It describes the basic theory behind each of these techniques, the types of data produced from each, and some typical applications. The article explains the strengths of AES, XPS, and TOF-SIMS based on data obtained from the surface of a slightly corroded stainless steel sheet.

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John G. Newman, 2002. "Chemical Characterization of Surfaces", Failure Analysis and Prevention, William T. Becker, Roch J. Shipley

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