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ASM Handbook

Corrosion: Environments and Industries

Edited by
Stephen D. Cramer
Stephen D. Cramer
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Bernard S. Covino, Jr.
Bernard S. Covino, Jr.
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ASM International
Volume
13C
ISBN electronic:
978-1-62708-184-9
Publication date:
2006
Book Chapter

Corrosion in Semiconductor Wafer Fabrication

By
Mercy Thomas
Mercy Thomas
Texas Instruments
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Gary Hanvy
Gary Hanvy
Texas Instruments
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Khuzema Sulemanji
Khuzema Sulemanji
Texas Instruments
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Published:
2006
Page range:
623 - 628
Publication history
October 06, 2006

Abstract

This article presents a detailed examination of corrosion at the various production stages of wafer fabrication. The corrosion issues related to batch metal-etch systems and single-wafer metal-etch systems are also discussed. The article provides a case study, which illustrates that the factors outside the normal processing of wafers or tool-specific problems can contribute to metal-line corrosion.

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Mercy Thomas, Gary Hanvy, Khuzema Sulemanji, 2006. "Corrosion in Semiconductor Wafer Fabrication", Corrosion: Environments and Industries, Stephen D. Cramer, Bernard S. Covino, Jr.

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