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ASM Handbook

Surface Engineering

Edited by
C.M. Cotell
C.M. Cotell
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J.A. Sprague
J.A. Sprague
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F.A. Smidt, Jr.
F.A. Smidt, Jr.
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ASM International
Volume
5
ISBN electronic:
978-1-62708-170-2
Publication date:
1994
Book Chapter

Growth and Growth-Related Properties of Films Formed by Physical Vapor Deposition

By
Donald M. Mattox
Donald M. Mattox
IP Industries
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Published:
1994
Page range:
538 - 555

Abstract

This article describes eight stages of the atomistic film growth: vaporization of the material, transport of the material to the substrate, condensation and nucleation of the atoms, nuclei growth, interface formation, film growth, changes in structure during the deposition, and postdeposition changes. It also discusses the effects and causes of growth-related properties of films deposited by physical vapor deposition processes, including residual film stress, density, and adhesion.

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Donald M. Mattox, 1994. "Growth and Growth-Related Properties of Films Formed by Physical Vapor Deposition", Surface Engineering, C.M. Cotell, J.A. Sprague, F.A. Smidt, Jr.

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