Skip to Main Content
ASM Handbook

Surface Engineering

Edited by
C.M. Cotell
C.M. Cotell
Search for other works by this author on:
J.A. Sprague
J.A. Sprague
Search for other works by this author on:
F.A. Smidt, Jr.
F.A. Smidt, Jr.
Search for other works by this author on:
ASM International
Volume
5
ISBN electronic:
978-1-62708-170-2
Publication date:
1994
Book Chapter

Surface and Interface Analysis of Coatings and Thin Films

By
S. Hofmann
S. Hofmann
Max-Planck-Institut für Metallforschung, Institut für Werkstoffwissenschaft
,
Stuttgart
,
Germany
Search for other works by this author on:
Published:
1994
Page range:
669 - 678

Abstract

Coatings and thin films can be studied with surface analysis methods because their inherently small depth allows characterization of the surface composition, interface composition, and in-depth distribution of composition. This article describes principles and examples of common surface analysis methods, namely, Auger electron spectroscopy, X-ray photoelectron spectroscopy, ion scattering spectroscopy, secondary ion mass spectroscopy, and Rutherford backscattering spectroscopy. It also provides useful information on the applications of surface analysis.

You do not currently have access to this content.
Don't already have an account? Register

S. Hofmann, 1994. "Surface and Interface Analysis of Coatings and Thin Films", Surface Engineering, C.M. Cotell, J.A. Sprague, F.A. Smidt, Jr.

Download citation file:


×
Close Modal
This Feature Is Available To Subscribers Only

Sign In or Create an Account

Close Modal
Close Modal