Interstitial carbon (C) in β-Ti, α-Ti, α 2 -Ti 3 Al and γ-TiAl phases present in the γ-TiAl alloys with and without substitutional elements (M: transition element) is quantitatively analyzed using soft X-ray emission spectroscopy (SXES), in order to reveal the effect of solute carbon on the phase equilibria. SXES for carbon analysis was used and the peak intensity of the second reflection of carbon Kα is analyzed using the fully homogenized sample having different C content under the optimum condition to make the accurate calibration curves. The obtained calibration curve is in an accuracy of ± 0.07 at. % C. In all heat treated alloys, no carbide is observed. In Ti-Al binary system, the α+γ phase region shifts toward higher Ti side, and the volume fraction of γ phase increases slightly with the carbon addition. In all system, carbon preferentially partitions into the α phase, followed by less partitioning in the γ and β phases in order. The carbon content in the β phase remains unchanged of almost 0.05 at. % regardless of carbon addition in Ti-Al-V system and the partition coefficient of carbon between the α and γ phases becomes larger in Ti-Al-V system than that in TiAl binary system.